Environmental, safety, and health issues in IC production : symposium held December 4-5, 1996, Boston, Massachusetts, U.S.A. /
In situ monitoring of HF reprocessing in an industrial scale recirculator bath / A.J. Reddy [and others] -- Anhydrous HF processing as an alternative to HF/water processes / J. Staffa [and others] -- Minimization of DI water consumption in wet clean rinse tanks / J. Cook -- The implementation of dil...
| Corporate Author: | |
|---|---|
| Other Authors: | |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Pittsburgh, Pa. :
Materials Research Society,
1997.
|
| Series: | Materials Research Society symposia proceedings ;
v. 447. |
| Subjects: |
Lehigh
| Call Number: |
363.11962 E61 Electronic conference |
|---|
Carnegie Mellon
| Call Number: |
TK7836 .E58 1997 |
|---|
Temple
| Call Number: |
TK7836 .E58 1997 |
|---|
Penn State
| Call Number: |
TA401.3.M39 v.447 |
|---|