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Format:
Conference Proceeding
Author:
Society of Photo-optical Instrumentation Engineers
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Conference papers and proceedings
Suggested Topics:
Microelectromechanical systems
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Materials
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Format:
Conference Proceeding
Author:
Society of Photo-optical Instrumentation Engineers
Genre:
Conference papers and proceedings
Suggested Topics:
Microelectromechanical systems
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Materials
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Micro- and nanotechnology : materials, processes, packaging, and systems II : 13-15 December 2004, Sydney, Australia /
Bellingham, Wash. : SPIE, 2005
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T - Technology
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Chiao, Jung-Chih
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International Symposium on Smart Materials, Nano-, and Micro-Smart Systems
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