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1
1981 Symposium on VLSI Technology digest of technical papers, September 9-11, 1981, Hawaii.
[New York] : [S.l.] : IEEE Electron Devices Society ; Japan Society of Applied Physics, 1981

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2
2001 Symposium on VLSI Technology digest of technical papers : June 12-14, 2001, Kyoto /
Piscataway, NJ : Tokyo : IEEE Service Center Single Publication Sales Unit ; Business Center for Academic Societies Japan, 2001

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3
Microprocesses and nanotechnology 2001 2001 International Microprocesses and Nanotechnology Conference, October 31-November 2, 2001, Shimane, Japan : digest of papers /
Tokyo : Business Center for Academic Societies Japan, 2001

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4
1985 Symposium on VLSI Technology May 14-16, 1985, Kobe : digest of technical papers /
Tokyo, Japan : Piscataway, N.J. : Business Center for Academic Societies Japan ; [Available from] IEEE Service Center Single Publication Sales Unit, 1985

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5
ISSM 2006 conference proceedings : the Thirteenth International Symposium on Semiconductor Manufacturing : September 25-27, 2006, Century Hyatt Tokyo, Tokyo, Japan /
Tokyo, Japan : Semiconductor Portal, Inc., 2006

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6
1996 1st International Symposium on Plasma Process-Induced Damage 13-14 May 1996, Santa Clara, California, USA /
Sunnyvale, CA : Northern California Chapter of the American Vacuum Society, 1996

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7
Proceedings of the 2013 IEEE International Interconnect Technology Conference IITC ... June 13-15, 2013, Kyoto Research Park, Kyoto, Japan /
Piscataway, N.J. : IEEE, 2013

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8
2002 Symposium on VLSI Technology digest of technical papers : June 11-13, 2002, Honolulu /
Piscataway, N.J. : Tokyo, Japan : IEEE ; Business Center for Academic Societies Japan, 2002

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9
VLSI Technology, 2006, Digest of Technical Papers, 2006 Symposium on
[Piscataway, N.J.] : IEEE, 2006

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10
1987 Symposium on VLSI Technology digest of technical papers : May 18-21, 1987, Karuizawa /
Tokyo, Japan : Piscataway, NJ : Business Center for Academic Societies Japan ; IEEE Service Center Single Publication Sales Unit [distributor], 1987

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11
2002 7th International Symposium on Plasma- and Process-Induced Damage June 5-7, 2002, Maui, Hawaii, USA /
Santa Clara, Calif. : AVS, 2002

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12
2013 Symposium on VLSI Technology digest of technical papers : 2013 VLSI Technology Symposium, Kyoto /
Piscataway, NJ : Tokyo : IEEE ; ICS Convention Design, Inc., 2013

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13
1986 Symposium on VLSI Technology digest of technical papers : May 28-30, 1986, San Diego /
Tokyo, Japan : Piscataway, NJ : Business Center for Academic Societies Japan ; IEEE Service Center Single Publication Sales Unit [distributor], 1986

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14
2002 International Conference on Simulation of Semiconductor Processes and Devices SISPAD 2002 : September 4-6, 2002, International Conference Center Kobe, Kobe, Japan /
Tokyo, Japan : Business Center for Academic Societies, Japan, 2002

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15
2005 International Conference on Simulation of Semiconductor Processes and Devices SISPAD 2005 : September 1-3, 2005, Komba Eminence, Tokyo, Japan /
Piscataway, N.J. : IEEE, 2005

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16
The proceedings of AM-FPD 13 the Twentieth International Workshop on Active-Matrix Flatpanel Displays and Devices : TFT technologies and FPD materials : July 2-5, 2013, Ryukoku University Avanti Kyoto Hall, Kyoto, Japan.
Chiba, Japan : Japan Society of Applied Physics, 2013

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17
Digest of technical papers /

Conference Proceeding
18
Microprocesses and nanotechnology 2003 digest of papers : 2003 International Microprocesses and Nanotechnology Conference : October 29-31, 2003, Tokyo, Japan /
Tokyo, Japan : Business Center for Academic Societies Japan, 2003

Electronic Conference Proceeding Book
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