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1
Integrated circuit metrology, inspection, and process control VIII : 28 February-2 March, San Jose, California /
Bellingham, Wash., USA : SPIE, 1994

This item is not available through EZBorrow. Please contact your institution’s interlibrary loan office for further assistance.
Conference Proceeding Book
2
Metrology, inspection, and process control for microlithography XVIII : 23-26 February 2004, Santa Clara, California, USA /
Bellingham, Wash. : SPIE, 2004

This item is not available through EZBorrow. Please contact your institution’s interlibrary loan office for further assistance.
Book
3
Integrated circuit metrology, inspection, and process control VI : 9-11 March 1992, San Jose, California /
Bellingham, Wash., USA : Society of Photo-Optical Instrumentation Engineers, 1992

This item is not available through EZBorrow. Please contact your institution’s interlibrary loan office for further assistance.
Book
4
Metrology, inspection, and process control for microlithography XVI : 4-7 March, 2002, Santa Clara, [California] USA /
Bellingham, Wash. : SPIE, 2002

This item is not available through EZBorrow. Please contact your institution’s interlibrary loan office for further assistance.
Book
5
Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, Santa Clara, California /
Bellingham, Wash., USA : SPIE, 1998

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Book
6
Metrology, inspection, and process control for microlithography XI : 10-12 March, 1997, Santa Clara, California /
Bellingham, Washington : SPIE, 1997

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Book
7
Handbook of silicon semiconductor metrology /
New York : Marcel Dekker, 2001

Book
8
Metrology, inspection, and process control for microlithography XVII : 24-27 February, 2003, Santa Clara, California, USA /
Bellingham, Wash. : SPIE, 2003

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Book
9
Metrology, inspection, and process control for microlithography XIV : 28 February-2 March, 2000, Santa Clara, California /
Bellingham, Wash. : SPIE, 2000

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Book
10
Metrology, inspection, and process control for microlithography XXIV : 22-25 February 2010, San Jose, California, United States /
Bellingham, Wash. : SPIE, 2010

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Book
11
Metrology Inspection and Process Control for Microlithography XXVIII : 24-27 February 2014, San Jose, California, United States /
Bellingham, Washington : SPIE, 2014

This item is not available through EZBorrow. Please contact your institution’s interlibrary loan office for further assistance.
Conference Proceeding Book
12
Metrology, inspection, and process control for microlithography X : 11-13 March, 1996, Santa Clara, California /
Bellingham, WA : SPIE, 1996

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Conference Proceeding Book
13
Developments in surface contamination and cleaning : fundamentals and applied aspects /
Norwich, NY : W. Andrew Pub., 2008

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Book
14
Metrology, inspection, and process control for microlithography XX : 20-23 February 2006, San Jose, California, USA /
Bellingham, Wash. : SPIE, 2006

This item is not available through EZBorrow. Please contact your institution’s interlibrary loan office for further assistance.
Book
15
Metrology, inspection, and process control for microlithography XXVI : 13-16 February 2012, San Jose, California, United States /
Bellingham, Wash. : SPIE, 2012

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Book
16
Metrology, inspection, and process control for microlithography XXV : 28 February-3 March 2011, San Jose, [California], United States /
Bellingham, Wash. : SPIE, 2011

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Book
17
Metrology, inspection, and process control for microlithography XXIII : 23-26 February 2009, San Jose, California, United States /
Bellingham, Wash. : SPIE, 2009

This item is not available through EZBorrow. Please contact your institution’s interlibrary loan office for further assistance.
Book
18
Integrated circuit metrology, inspection, and process control VII : 2-4 March 1993, San Jose, California /
Bellingham, Wash., USA : SPIE, 1993

This item is not available through EZBorrow. Please contact your institution’s interlibrary loan office for further assistance.
Book
19
Developments in surface contamination and cleaning /
Norwich, NY, U.S.A. : W. Andrew Pub., 2008

This item is not available through EZBorrow. Please contact your institution’s interlibrary loan office for further assistance.
Book
20
Integrated circuit metrology, inspection, and process control IV : 5-6 March 1990, San Jose, California /
Bellingham, Wash., USA : SPIE, 1990

This item is not available through EZBorrow. Please contact your institution’s interlibrary loan office for further assistance.
Book
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