Optical microlithography and metrology for microcircuit fabrication : 27-28 April 1989, Paris, France /

Bibliographic Details
Corporate Authors: European Physical Society, European Federation for Applied Optics, Society of Photo-optical Instrumentation Engineers, Association nationale de la recherche technique, ECO2
Other Authors: Lacombat, Michel J., Wittekoek, Steven
Format: Conference Proceeding Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1989]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 1138.
Subjects:

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Lehigh

Holdings details from Lehigh
Call Number: Electronic book