Small scale structures : proceedings of Symposium A on Microstructuring and Microsystems, Symposium B on Materials for Sensors: Functional Nanoscaled Structures, and Symposium E on Structure and Properties of Metallic Thin Films and Multilayers of the 1995 E-MRS Spring Conference, Strasbourg, France, May 22-26, 1995 /

This book contains the proceedings of 3 symposia dealing with various aspects of small scale structures. Symposium A deals with the development of new materials, including ceramics, polymers, metals, etc., their microstructuring as well as their potential for application in microsystems. All kinds o...

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Bibliographic Details

Corporate Authors:	Symposium A on Microstructuring and Microsystems Strasbourg, France, Symposium B on Materials for Sensors: Functional Nanoscaled Structures, Symposium E on Structure and Properties of Metallic Thin Films and Multilayers
Other Authors:	Rooij, N. F. de (Editor)
Format:	Conference Proceeding Book
Language:	English
Published:	[Place of publication not identified] : North Holland, 1996.
Series:	European Materials Research Society symposia proceedings ; 52.
Subjects:	Materials > Congresses. Microstructure > Congresses. Thin films > Congresses. Microstructure. Thin films. Electronic books.