Integrated circuit metrology, inspection, and process control : [papers] /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Monahan, Kevin M.
Format: Book
Published: Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, [1987]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 775.

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Holdings details from Lehigh
Call Number: Electronic book