Mass spectrometry of dielectric and metal etch discharges : a study of C²F⁶, CHF³ and CI²/BCI³ discharge chemistries.

Yazar: Jayaraman, RaviPrakash
[Place of publication not identified] : [publisher not identified], 1998

Thin film hydrogen sensors a materials processing approach /

Yazar: Jayaraman, RaviPrakash
[Place of publication not identified] : [publisher not identified], 2002